3D analysis of semiconductor structures using HAADF STEM tomography

Institute of Physics Conference Series

Volumn 179, Issue , 2004, Pages 31-34

  Yates, T J V ^a   Laffont, L ^a   Weyland, M ^a   Zhi, D ^a   Midgley, P A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; COMPUTER SOFTWARE; ELECTRON SCATTERING; IMAGE ANALYSIS; IMAGE RECONSTRUCTION; ITERATIVE METHODS; MOLECULAR BEAM EPITAXY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR QUANTUM DOTS; THREE DIMENSIONAL; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON TOMOGRAPHY; FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPY (FEGTEM); SCANNING TUNNELING ELECTRON MICROSCOPY (STEM); THREE-DIMENSIONAL (3D) OBJECTS;

SCANNING TUNNELING MICROSCOPY;

EID: 5044228946     PISSN: 09513248     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Midgley P A and Weyland M 2003 Ultramicrosc. 96(3-4) 413-431.
2. Gilbert P F C 1972 Proc. R. Soc. Lond. B. 182 89-102.
3. Liu C P, Preston A R, Boothroyd C B and Humphreys C J 1998 J. Microsc. 194 171-182.
4. Peng L-M, Ren G, Dudarev S L and Whelan M J 1996 Acta Cryst A52 456-470.
5. Rez D, Rez P and Grant I1994 Acta Cryst. A50 481-497.