Electron inelastic mean free path and dielectric properties of a -boron, a -carbon, and their nitrides as determined by quantitative analysis of reflection electron energy loss spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 3, 2006, Pages 396-407

  Prieto, P ^a   Quiros C ^a,b   Elizalde, E ^a   Sanz, J M ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b Universidad de Quiedo Auda de Calio Sotelo S n   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CARBON; CHEMICAL ANALYSIS; ELECTRON ENERGY LOSS SPECTROSCOPY; MATHEMATICAL MODELS; NITRIDES; THIN FILMS;

AMORPHOUS BORON (A-B); AMORPHOUS CARBON (A-C); ENERGY LOSS FUNCTION (ELF); INELASTIC MEAN FREE PATH (IMFP);

AMORPHOUS MATERIALS;

EID: 33646568143     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2183249     Document Type: Article

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