Thin BN films obtained by dual-ion-beam sputtering: An FT-IR and spectroscopic ellipsometry characterization

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 275-279

  Quiros C ^a   Prieto, P ^a   Trigo, J F ^a   Elizalde, E ^a   Sanz, J M ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; RADIATION EFFECTS; REFRACTIVE INDEX; SPUTTERING; SUBSTRATES; TARGETS; THIN FILMS;

DUAL ION BEAM SPUTTERING; SPECTROSCOPIC PHASE MODULATED ELLIPSOMETRY;

ION BEAM LITHOGRAPHY;

EID: 0030563493     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01278-8     Document Type: Article

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