The constitution and properties of cubic boron nitride thin films: A comparative study on the influence of bombarding ion energy

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1121-1125

  Sell, K ^a   Ulrich, S ^a   Nold, E ^a   Ye, J ^a   Leiste, H ^a   Stuber M ^a   Holleck, H ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Cubic boron nitride; Electron energy loss spectroscopy; R.f. sputtering; Stress

Indexed keywords

COMPRESSIVE STRESS; ELECTRON ENERGY LOSS SPECTROSCOPY; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; NUCLEATION; THIN FILMS;

RADIO FREQUENCY;

CUBIC BORON NITRIDE;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0042854697     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00533-4     Document Type: Article

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