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Volumn 33, Issue 3, 2002, Pages 230-237
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Electron inelastic mean free path for Ti, TiC, TiN and TiO2 as determined by quantitative reflection electron energy-loss spectroscopy
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Author keywords
Energy loss function; Inelastic mean free path; Inelastic scattering cross section
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Indexed keywords
CARRIER CONCENTRATION;
COMPOSITION EFFECTS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ELECTRON REFLECTION;
ENERGY DISSIPATION;
POLYCRYSTALLINE MATERIALS;
SPECTROSCOPIC ANALYSIS;
SURFACE TOPOGRAPHY;
TITANIUM;
TITANIUM CARBIDE;
TITANIUM NITRIDE;
TITANIUM OXIDES;
BETHE EQUATION;
ELECTRON INELASTIC MEAN FREE PATH;
QUANTITATIVE REFLECTION ELECTRON ENERGY-LOSS SPECTROSCOPY;
VALENCE ELECTRONS;
ELECTRON SCATTERING;
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EID: 0036500918
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1205 Document Type: Article |
Times cited : (72)
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References (44)
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