sp2 and sp3 bonding configurations in low nitrogen content a-CNx thin films

Journal of Physics D: Applied Physics

Volumn 36, Issue 5, 2003, Pages 541-544

  Mezzasalma, A M ^a   Mondio, G ^a   Neri, F ^a   Trusso, S ^b  

^a UNIVERSITY OF MESSINA   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; DENSITY (SPECIFIC GRAVITY); ELECTRON ENERGY LOSS SPECTROSCOPY; FILM GROWTH; GRAPHITIZATION; LASER BEAMS; NITROGEN; PULSED LASER DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE SILICON; REFLECTION ELECTRON ENERGY LOSS SPECTROSCOPY;

CHEMICAL BONDS;

EID: 0037423967     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/5/318     Document Type: Article

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