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Volumn 36, Issue 8, 2004, Pages 820-823

Quantitative REELS of amorphous carbon and carbon nitride films

Author keywords

Carbon nitride; Electron energy loss spectroscopy; Optical properties

Indexed keywords

DIELECTRIC FUNCTIONS; ELECTRON-SOLID INTERACTIONS; ENERGY LOSS FUNCTIONS (ELF); SPUTTER CONDITIONS;

EID: 4444322647     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1773     Document Type: Conference Paper
Times cited : (4)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.