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Volumn 36, Issue 8, 2004, Pages 820-823
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Quantitative REELS of amorphous carbon and carbon nitride films
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Author keywords
Carbon nitride; Electron energy loss spectroscopy; Optical properties
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Indexed keywords
DIELECTRIC FUNCTIONS;
ELECTRON-SOLID INTERACTIONS;
ENERGY LOSS FUNCTIONS (ELF);
SPUTTER CONDITIONS;
AMORPHOUS MATERIALS;
CARBON NITRIDE;
COMPUTER SIMULATION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ION BEAMS;
MATHEMATICAL MODELS;
OPTICAL COATINGS;
SPUTTERING;
CARBON;
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EID: 4444322647
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1773 Document Type: Conference Paper |
Times cited : (4)
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References (16)
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