The influence of film structure on In2O3 gas response

Thin Solid Films

Volumn 460, Issue 1-2, 2004, Pages 315-323

  Korotcenkov, G ^a   Brinzari, V ^a   Cerneavschi, A ^a   Ivanov, M ^a   Golovanov, V ^b   Cornet, A ^c   Morante, J ^c   Cabot, A ^c   Arbiol, J ^c  

^a TECHNICAL UNIVERSITY OF MOLDOVA   (Moldova)

^b SOUTH UKRAINIAN NATIONAL PEDAGOGICAL UNIVERSITY   (Ukraine)

^c UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Deposition process; Indium oxide; Sensors; Structural properties

Indexed keywords

DEPOSITION; FILM GROWTH; GRAIN SIZE AND SHAPE; INDIUM COMPOUNDS; PYROLYSIS; SENSORS; SPRAY GUNS; STOICHIOMETRY; VACUUM;

DEPOSITION PROCESS; FILM STRUCTURE; INDIUM OXIDES; STRUCTURAL PROPERTIES;

THIN FILMS;

EID: 2942568552     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.02.018     Document Type: Article

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