메뉴 건너뛰기




Volumn 26, Issue 3-4, 2006, Pages 354-371

Residual stress analysis in micro- and nano-structured materials by X-ray diffraction

Author keywords

Micro and nano structured materials; Residual stresses; Synchrotron radiation; X ray diffraction

Indexed keywords

DATA REDUCTION; NANOSTRUCTURED MATERIALS; STRESS ANALYSIS; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS;

EID: 33646237587     PISSN: 02681900     EISSN: None     Source Type: Journal    
DOI: 10.1504/ijmpt.2006.009475     Document Type: Article
Times cited : (8)

References (52)
  • 1
    • 0034744715 scopus 로고    scopus 로고
    • Interface controlled plasticity in metals: Dispersion hardening and thin film deformation
    • Arzt, E., Dehm, G., Gumbsch, P., Kraft. O. and Weiss, D. (2001) 'Interface controlled plasticity in metals: dispersion hardening and thin film deformation'. Prog. Mat. Sci., pp.283-307.
    • (2001) Prog. Mat. Sci. , pp. 283-307
    • Arzt, E.1    Dehm, G.2    Gumbsch, P.3    Kraft, O.4    Weiss, D.5
  • 2
    • 0038319049 scopus 로고    scopus 로고
    • Residual stress and elastic constant analysis by X-ray diffraction in thin film
    • Badawi, K.F. and Villain, P. (2003) 'Residual stress and elastic constant analysis by X-ray diffraction in thin film', Journal of Applied Crystallography. Vol. 36, pp.869- 879.
    • (2003) Journal of Applied Crystallography , vol.36 , pp. 869-879
    • Badawi, K.F.1    Villain, P.2
  • 3
    • 0035883461 scopus 로고    scopus 로고
    • Interfacial structure in (111) Au:Ni multilayers investigated by anomalous x-ray diffraction
    • Bigault, T., Bocquet, F., Labat, S., Thomas, O. and Renevier, H. (2001) 'Interfacial structure in (111) Au:Ni multilayers investigated by anomalous x-ray diffraction'. Phys. Rev B., Vol. 64, 125414.
    • (2001) Phys. Rev B. , vol.64 , pp. 125414
    • Bigault, T.1    Bocquet, F.2    Labat, S.3    Thomas, O.4    Renevier, H.5
  • 4
    • 0038374804 scopus 로고    scopus 로고
    • X-ray diffraction from inhomogeneous thin films of nanometre thickness: Modelling and experiment
    • Bocquet, F., Gergaud, P. and Thomas, O. (2003) 'X-ray diffraction from inhomogeneous thin films of nanometre thickness: modelling and experiment'. J. Appl. Cryst., Vol. 36, pp. 154-157.
    • (2003) J. Appl. Cryst. , vol.36 , pp. 154-157
    • Bocquet, F.1    Gergaud, P.2    Thomas, O.3
  • 6
    • 17044454692 scopus 로고    scopus 로고
    • Stresses during sulicide formation: A review
    • d'Heurle, F.M. and Thomas, O. (1996) 'Stresses during sulicide formation: a review', Defect and Diffusion Forum, pp. 129-130, 137-150.
    • (1996) Defect and Diffusion Forum , pp. 129-130
    • D'Heurle, F.M.1    Thomas, O.2
  • 7
    • 0024129196 scopus 로고
    • Stresses and deformation processes in thin films on substrates
    • Doerner, M.F. and Nix, W.D. (1988) 'Stresses and deformation processes in thin films on substrates', Crit. Rev. Solid State Mater. Sci., Vol. 14, pp.225-268.
    • (1988) Crit. Rev. Solid State Mater. Sci. , vol.14 , pp. 225-268
    • Doerner, M.F.1    Nix, W.D.2
  • 8
    • 85086633472 scopus 로고    scopus 로고
    • Advantagous use of glass capillaries as primary optics for X-ray residual stress analyses and a novel concept for 'Micro diffraction' stress analysis
    • Eigenman, B., Langhoff, N., Bjeoumikhov, A., Haase, A. and Stabenow, R. (2002) 'Advantagous use of glass capillaries as primary optics for X-ray residual stress analyses and a novel concept for 'Micro diffraction' stress analysis'. Materials Science Forum, pp.404-407, 303-308.
    • (2002) Materials Science Forum , pp. 404-407
    • Eigenman, B.1    Langhoff, N.2    Bjeoumikhov, A.3    Haase, A.4    Stabenow, R.5
  • 9
    • 0002052366 scopus 로고
    • Determination of inhomogeneous residual-stress states in surface-layers of machined engineering ceramics by synchrotron X-rays
    • Eigenmann, B. and Macherauch, E. (1995) 'Determination of inhomogeneous residual-stress states in surface-layers of machined engineering ceramics by synchrotron X-rays', Nucl. Instr. and Meth. in Phys. Res. B, Vol. 97, pp.92-97.
    • (1995) Nucl. Instr. and Meth. in Phys. Res. B , vol.97 , pp. 92-97
    • Eigenmann, B.1    Macherauch, E.2
  • 11
    • 0028727555 scopus 로고
    • Formalism for the evaluation of strongly nonlinear surface stress-fields by X-ray-diffraction performed in the scattering vector mode
    • Genzel, C. (1994) 'Formalism for the evaluation of strongly nonlinear surface stress-fields by X-Ray-Diffraction performed in the scattering vector mode', Phys. Stat. Solid A, Vol. 146, pp.629-637.
    • (1994) Phys. Stat. Solid A , vol.146 , pp. 629-637
    • Genzel, C.1
  • 12
    • 33646237982 scopus 로고    scopus 로고
    • Non destructive analysis of residual stress gradients sij(z) in the near surface region by diffraction method. Problems and attempts at their solution
    • Linköping, Sweden, June 16-18, 1997, Institute of Technology, Linköping Universitet
    • Genzel, C. (1997) 'Non destructive analysis of residual stress gradients sij(z) in the near surface region by diffraction method. Problems and attempts at their solution', Proceedings of the 5th International Conference on Residual Stress, ICRS-5, Linköping, Sweden, June 16-18, 1997, Institute of Technology, Linköping Universitet, pp.514-521.
    • (1997) Proceedings of the 5th International Conference on Residual Stress , vol.ICRS-5 , pp. 514-521
    • Genzel, C.1
  • 13
    • 0031998944 scopus 로고    scopus 로고
    • A study of X-ray residual stress gradient analysis in thin layers with strong fibre texture - I. Evaluation of the stress factors F-ij
    • Genzel, C. (1998) 'A study of X-ray residual stress gradient analysis in thin layers with strong fibre texture - I. Evaluation of the stress factors F-ij', Phys. Stat. Solid A, Vol. 65, pp.347-360.
    • (1998) Phys. Stat. Solid A , vol.65 , pp. 347-360
    • Genzel, C.1
  • 14
    • 0001133746 scopus 로고    scopus 로고
    • A self-consistent method for X-ray diffraction analysis of multiaxial residual-stress fields in the near-surface region of polycrystalline materials. I. Theoretical concept
    • Genzel, C. (1999) 'A self-consistent method for X-ray diffraction analysis of multiaxial residual-stress fields in the near-surface region of polycrystalline materials. I. Theoretical concept', J. Appl. Cryst., Vol. 32, pp.770-778.
    • (1999) J. Appl. Cryst. , vol.32 , pp. 770-778
    • Genzel, C.1
  • 15
    • 0032045954 scopus 로고    scopus 로고
    • A study of X-ray residual stress gradient analysis in thin layers with strong fibre texture - II. Examples
    • Genzel, C. and Reimers, W. (1998) 'A study of X-ray residual stress gradient analysis in thin layers with strong fibre texture - II. Examples', Phys. Stat. Solid A, Vol. 166, pp.751-762.
    • (1998) Phys. Stat. Solid A , vol.166 , pp. 751-762
    • Genzel, C.1    Reimers, W.2
  • 16
    • 0000516763 scopus 로고    scopus 로고
    • A self-consistent method for X-ray diffraction analysis of multiaxial residual-stress fields in the near-surface region of polycrystalline materials. II. Examples
    • Genzel, C., Broda, M., Dantz, D. and Reimers, W. (1999) 'A self-consistent method for X-ray diffraction analysis of multiaxial residual-stress fields in the near-surface region of polycrystalline materials. II. Examples', J. Appl. Cryst., Vol. 32, pp.779-787.
    • (1999) J. Appl. Cryst. , vol.32 , pp. 779-787
    • Genzel, C.1    Broda, M.2    Dantz, D.3    Reimers, W.4
  • 17
    • 0042011373 scopus 로고    scopus 로고
    • Stresses arising from a solid state reaction between palladium films and Si(001) investigated by in situ combined x-ray diffraction and curvature measurements
    • Gergaud, P., Thomas, O. and Chenevier, B. (2003) 'Stresses arising from a solid state reaction between palladium films and Si(001) investigated by in situ combined x-ray diffraction and curvature measurements', J. Appl. Phys., Vol. 94, pp. 1584-1591.
    • (2003) J. Appl. Phys. , vol.94 , pp. 1584-1591
    • Gergaud, P.1    Thomas, O.2    Chenevier, B.3
  • 19
    • 0001434703 scopus 로고
    • Elastic strains in GaAs/A1As quantum dots studied by high-resolution X-ray diffraction
    • Holy, V., Darhuber, A., Bauer, G., Wang, P., Song, Y., Sotomayor Torres, C. and Holland, M. (1995) 'Elastic strains in GaAs/A1As quantum dots studied by high-resolution X-ray diffraction', Phys. Rev. B, Vol. 52, pp.8348-8357.
    • (1995) Phys. Rev. B , vol.52 , pp. 8348-8357
    • Holy, V.1    Darhuber, A.2    Bauer, G.3    Wang, P.4    Song, Y.5    Sotomayor, T.C.6    Holland, M.7
  • 21
    • 0037425408 scopus 로고    scopus 로고
    • Stress distributions in growing oxide films
    • Krishnamurty, R. and Srolovitz, D.JActa (2003) 'Stress distributions in growing oxide films', Acta Mater., Vol. 51, pp.2171-2190.
    • (2003) Acta Mater. , vol.51 , pp. 2171-2190
    • Krishnamurty, R.1    Srolovitz, D.J.2
  • 22
    • 0020099193 scopus 로고
    • Low-temperature strain behavior of lead thin films on a substrate
    • Kuan, T.S. and Murakami, M. (1982) 'Low-temperature strain behavior of lead thin films on a substrate', Metall. Trans. A, Vol. 13, pp.383-391.
    • (1982) Metall. Trans. A , vol.13 , pp. 383-391
    • Kuan, T.S.1    Murakami, M.2
  • 23
    • 0022035026 scopus 로고
    • The interactions of composition and stress in crystalline solids
    • Lariche, F.C. and Cahn, J.W. (1985) 'The interactions of composition and stress in crystalline solids', Acta Metall., Vol. 33, pp.331-357.
    • (1985) Acta Metall. , vol.33 , pp. 331-357
    • Lariche, F.C.1    Cahn, J.W.2
  • 24
    • 0037148873 scopus 로고    scopus 로고
    • Three-dimensional X-ray structural microscopy with submicrometre resolution
    • Larson, B.C., Yang, W., Ice, G.E., Budai, J.D. and Tischler, J.Z. (2002) 'Three-dimensional X-ray structural microscopy with submicrometre resolution'. Nature, Vol. 415, pp.887-890.
    • (2002) Nature , vol.415 , pp. 887-890
    • Larson, B.C.1    Yang, W.2    Ice, G.E.3    Budai, J.D.4    Tischler, J.Z.5
  • 25
  • 26
    • 2942677208 scopus 로고    scopus 로고
    • Strain, size, and composition of InAs quantum sticks embedded in InP determined via grazing incidence x-ray anomalous diffraction
    • Letoublon, A., Favre-Nicolin, V., Renevier, H., Proietti, M.G., Monat, C., Gendry, M., Marty, O. and Priester, C. (2004) 'Strain, size, and composition of InAs quantum sticks embedded in InP determined via grazing incidence x-ray anomalous diffraction', Phys. Rev. Lett., Vol. 92, 186101.
    • (2004) Phys. Rev. Lett. , vol.92 , pp. 186101
    • Letoublon, A.1    Favre-Nicolin, V.2    Renevier, H.3    Proietti, M.G.4    Monat, C.5    Gendry, M.6    Marty, O.7    Priester, C.8
  • 27
    • 0033687239 scopus 로고    scopus 로고
    • A methodology development for the study of near surface stress gradients
    • Marques, M.J., Dias, A.M., Gergaud, P. and Lebrun, J.L. (2000) 'A methodology development for the study of near surface stress gradients', Mat. Sci. and Eng. Vol. A287, pp.78-86.
    • (2000) Mat. Sci. and Eng. , vol.A287 , pp. 78-86
    • Marques, M.J.1    Dias, A.M.2    Gergaud, P.3    Lebrun, J.L.4
  • 30
    • 0024766321 scopus 로고
    • Mechanical properties of thin films
    • Nix, W.D. (1989) 'Mechanical properties of thin films', Metall. Trans. A, Vol. 20, pp.2217-2245.
    • (1989) Metall. Trans. A , vol.20 , pp. 2217-2245
    • Nix, W.D.1
  • 32
    • 0040179137 scopus 로고
    • Proposed methods for depth profiling of residual stresses using grazing incidence X-ray diffraction (GIXD)
    • Predecki, P., Zhu, X. and Ballard, B. (1993) 'Proposed methods for depth profiling of residual stresses using grazing incidence X-ray diffraction (GIXD)', Adv. X-Rav Anal., Vol. 36, pp.237-245.
    • (1993) Adv. X-rav Anal. , vol.36 , pp. 237-245
    • Predecki, P.1    Zhu, X.2    Ballard, B.3
  • 33
    • 0035834199 scopus 로고    scopus 로고
    • Micromechanical and macromechanical effects in grain scale polycrystal plasticity experimentation and simulation
    • Raabe, D., Sachtleber, M., Zhao, Z., Roters, F. and Zaefferer, S. (2001) 'Micromechanical and macromechanical effects in grain scale polycrystal plasticity experimentation and simulation', Acta Mater., Vol. 49. pp.3433-3441.
    • (2001) Acta Mater. , vol.49 , pp. 3433-3441
    • Raabe, D.1    Sachtleber, M.2    Zhao, Z.3    Roters, F.4    Zaefferer, S.5
  • 34
    • 0031557609 scopus 로고    scopus 로고
    • Selective study of Fe atoms at the interfaces of an Fe/Ir(100) superlattice by means of diffraction anomalous fine structure
    • Renevier, H., Hodeau, J-L., Wolfers, P., Andrieu, S., Weigelt, J. and Frahm, R. (1997) 'Selective study of Fe atoms at the interfaces of an Fe/Ir(100) superlattice by means of diffraction anomalous fine structure', Phys. Rev. Lett., Vol. 78, pp.2775-2778.
    • (1997) Phys. Rev. Lett. , vol.78 , pp. 2775-2778
    • Renevier, H.1    Hodeau, J.-L.2    Wolfers, P.3    Andrieu, S.4    Weigelt, J.5    Frahm, R.6
  • 35
    • 0014797311 scopus 로고
    • Role of oxide microstructure and growth stresses in the high temperature scaling of nickel
    • Rhines, F. and Wolf, J. (1970) 'Role of oxide microstructure and growth stresses in the high temperature scaling of nickel', Metall. Trans., Vol. 1, pp.1701 1710.
    • (1970) Metall. Trans. , vol.1 , pp. 1701-1710
    • Rhines, F.1    Wolf, J.2
  • 36
    • 0041692417 scopus 로고    scopus 로고
    • Correlation between x-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS
    • Rigo, S., Goudeau, P., Desmarres, J-M., Masri, T., Petit, J-A and Schmitt, P. (2003) 'Correlation between x-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS', Microelectronic Reliability, Vol. 43, pp. 1963-1968.
    • (2003) Microelectronic Reliability , vol.43 , pp. 1963-1968
    • Rigo, S.1    Goudeau, P.2    Desmarres, J.-M.3    Masri, T.4    Petit, J.-A.5    Schmitt, P.6
  • 39
    • 0035935532 scopus 로고    scopus 로고
    • Use of coherent X-ray diffraction to map strain fields in nanocrystals
    • Robinson, I.K. and Vartanyants, I. (2001) 'Use of coherent X-ray diffraction to map strain fields in nanocrystals', Appl. Surf. Sci., Vol. 82, pp. 186-191.
    • (2001) Appl. Surf. Sci. , vol.82 , pp. 186-191
    • Robinson, I.K.1    Vartanyants, I.2
  • 40
    • 0001435306 scopus 로고    scopus 로고
    • Determination of interfacial strain distribution in quantum-wire structures by synchrotron x-ray scattering
    • Shen, Q. and Kycia, S. (1997) 'Determination of interfacial strain distribution in quantum-wire structures by synchrotron x-ray scattering', Phys. Rev. B, Vol. 55, pp.15791-15797.
    • (1997) Phys. Rev. B , vol.55 , pp. 15791-15797
    • Shen, Q.1    Kycia, S.2
  • 42
    • 0033666505 scopus 로고    scopus 로고
    • X-ray diffraction determination of residual stresses in narrow copper interconnects with submicronic widths
    • Sicardy, O., Touet, I., Arnaud, L., Charlet, F. and Berger, T. (2000) 'X-ray diffraction determination of residual stresses in narrow copper interconnects with submicronic widths', Materials Science Forum, pp.347-349, 562-567.
    • (2000) Materials Science Forum , pp. 347-349
    • Sicardy, O.1    Touet, I.2    Arnaud, L.3    Charlet, F.4    Berger, T.5
  • 43
    • 85013619216 scopus 로고    scopus 로고
    • Stress measurements in thin zirconia films at 300°C using synchrotron radiation
    • Sicardy, O., Touet, I., Rieutord, F. and Eymery, J. (2001) 'Stress measurements in thin zirconia films at 300°C using synchrotron radiation', Journal of Neutron Research, Vol. 9, pp.263-272.
    • (2001) Journal of Neutron Research , vol.9 , pp. 263-272
    • Sicardy, O.1    Touet, I.2    Rieutord, F.3    Eymery, J.4
  • 44
    • 0029244962 scopus 로고
    • The recent development of Bragg-Fresnel crystal optics. Experiments and applications at the ESRF
    • Snigirev, A. (1995) 'The recent development of Bragg-Fresnel crystal optics. Experiments and applications at the ESRF', Rev. Sci. Instrum., Vol. 66, pp.2053-2058.
    • (1995) Rev. Sci. Instrum. , vol.66 , pp. 2053-2058
    • Snigirev, A.1
  • 45
    • 0024092550 scopus 로고
    • Deformation during interdiffusion
    • Stephenson, G.B. (1988) 'Deformation during interdiffusion', Acta Metall., Vol. 36, pp.2663-2684.
    • (1988) Acta Metall. , vol.36 , pp. 2663-2684
    • Stephenson, G.B.1
  • 48
    • 0001367469 scopus 로고    scopus 로고
    • Strain profiles in epitaxial films from x-ray Bragg diffraction phases
    • Vartanyants, I., Ern, C., Donner, W., Dosch, H. and Caliebe, W. (2000) 'Strain profiles in epitaxial films from x-ray Bragg diffraction phases', Appl. Phys. Lett. Vol. 77, pp.3929-3931.
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 3929-3931
    • Vartanyants, I.1    Ern, C.2    Donner, W.3    Dosch, H.4    Caliebe, W.5
  • 49
    • 1342328043 scopus 로고    scopus 로고
    • Atomistic calculation of size effects on elastic coefficients in nanometre-sized tungsten layers and wires
    • Villain, P., Beauchamp, P., Badawi, K-F., Goudeau, P. and Renault, P.O. (2004) 'Atomistic calculation of size effects on elastic coefficients in nanometre-sized tungsten layers and wires', Scripta Materiala, Vol. 50, pp.1247-1251.
    • (2004) Scripta Materiala , vol.50 , pp. 1247-1251
    • Villain, P.1    Beauchamp, P.2    Badawi, K.-F.3    Goudeau, P.4    Renault, P.O.5
  • 50
    • 13944267499 scopus 로고    scopus 로고
    • Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction
    • Welzel, U., Ligot, J., Lamparter, P., Vermeulen, A.C. and Mittemeijer, E.J. (2005) 'Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction', J. Appl. Cryst.,Vol. 38, pp. 1-9.
    • (2005) J. Appl. Cryst. , vol.38 , pp. 1-9
    • Welzel, U.1    Ligot, J.2    Lamparter, P.3    Vermeulen, A.C.4    Mittemeijer, E.J.5
  • 51
    • 34547374271 scopus 로고
    • X-ray line broadening from filed aluminium and wolfram
    • Williamson, G.K. and Hall, W. (1953) 'X-ray line broadening from filed aluminium and wolfram', Acta Metall. Vol. 1, pp.22-31.
    • (1953) Acta Metall. , vol.1 , pp. 22-31
    • Williamson, G.K.1    Hall, W.2
  • 52
    • 0002045702 scopus 로고
    • Stresses from solid state reactions: A simple model, silicides
    • Zhang, S.L. and d'Heurle, P.M. (1992) 'Stresses from solid state reactions: a simple model, silicides'. Thin Solid Films Vol. 213, pp.34-39.
    • (1992) Thin Solid Films , vol.213 , pp. 34-39
    • Zhang, S.L.1    D'Heurle, P.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.