SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 469-470, Issue SPEC. ISS., 2004, Pages 201-205

Measurement of thin film elastic constants by X-ray diffraction

(6) Faurie, D a Renault, P O a Le Bourhis, E a Villain, P a Goudeau, Ph a Badawi, F a

a UNIVERSITÉ DE POITIERS (France)

Author keywords

Elasticity; Microstructure; Tensile testing; Texture; Thin films; X ray diffraction

Indexed keywords

ANISOTROPY; COMPOSITE MATERIALS; ELASTIC MODULI; GOLD; MICROSTRUCTURE; TENSILE TESTING; TEXTURES; TUNGSTEN; X RAY DIFFRACTION ANALYSIS;

ELASTIC CONSTANTS; INTERFACIAL ADHESION; TENSILE LOADS;

THIN FILMS;

EID: 10044260910 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.08.097 Document Type: Article

Times cited : (34)

References (24)

1
- 0003644433
- R.F. Bunshah (Ed.), Noyes, Park Ridge, NJ
- J.A. Thornmton, J.E. Greene, in: R.F. Bunshah (Ed.), Handbook of Deposition Technologies for Films and Coatings, 2nd ed., Noyes, Park Ridge, NJ, 1994.
- (1994) Handbook of Deposition Technologies for Films and Coatings, 2nd Ed.
- Thornmton, J.A.¹ Greene, J.E.²

2
- 0004133128
- Springer, New York
- I.C. Noyan, J.B. Cohen, Residual Stress Measurement by Diffraction and Interpretation, Springer, New York, 1987.
- (1987) Residual Stress Measurement by Diffraction and Interpretation
- Noyan, I.C.¹ Cohen, J.B.²

3
- 0004088732
- Assessment, Elsevier, Amsterdam
- V. Hauk, Structural and Residual Stress Analysis by Non Destructive Methods: Evaluation, Application, Assessment, Elsevier, Amsterdam, 1997.
- (1997) Structural and Residual Stress Analysis by Non Destructive Methods: Evaluation, Application
- Hauk, V.¹

4
- 10044224013
- H. Huang, F. Spaepen, Acta Mater. 48 (2000) 3251.
- (2000) Acta Mater. , vol.48 , pp. 3251
- Huang, H.¹ Spaepen, F.²

5
- 0035971709
- A.J. Kalkmann, A.M. Verbruggen, G.L.A.M. Jaussen, Appl. Phys. Lett. 78 (2001) 2673.
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2673
- Kalkmann, A.J.¹ Verbruggen, A.M.² Jaussen, G.L.A.M.³

6
- 16444381981
- J. Schiotz, T. Vegge, F.D. Di Tolle, K.W. Jacobsen, Phys. Rev., B 60 (1999) 11971.
- (1999) Phys. Rev., B , vol.60 , pp. 11971
- Schiotz, J.¹ Vegge, T.² Di Tolle, F.D.³ Jacobsen, K.W.⁴

7
- 0032647950
- T.Y. Tsui, G.M. Pharr, J. Mater. Res. 14 (1999) 292.
- (1999) J. Mater. Res. , vol.14 , pp. 292
- Tsui, T.Y.¹ Pharr, G.M.²

8
- 10044271550
- M.J. Bamber, K.E. Cooke, A.B. Mann, B. Derby, Thin Solid Films 299 (2001) 398.
- (2001) Thin Solid Films , vol.299 , pp. 398
- Bamber, M.J.¹ Cooke, K.E.² Mann, A.B.³ Derby, B.⁴

9
- 0035878956
- P. Djemia, F. Ganot, P. Moch, V. Branger, P. Goudeau, J. Appl. Phys. 90 (2001) 756.
- (2001) J. Appl. Phys. , vol.90 , pp. 756
- Djemia, P.¹ Ganot, F.² Moch, P.³ Branger, V.⁴ Goudeau, P.⁵

10
- 0000736297
- F. Attar, T. Johannesson, Thin Solid Films 258 (1995) 205.
- (1995) Thin Solid Films , vol.258 , pp. 205
- Attar, F.¹ Johannesson, T.²

11
- 0034784944
- S. Matthies, H.G. Priesmeyer, M.R. Daymond, J. Appl. Crystallogr. 34 (2001) 585.
- (2001) J. Appl. Crystallogr. , vol.34 , pp. 585
- Matthies, S.¹ Priesmeyer, H.G.² Daymond, M.R.³

12
- 0032615037
- M. Van Leeuwen, J.-D. Kamminga, E.J. Mittemeijer, J. Appl. Phys. 86 (1999) 1904.
- (1999) J. Appl. Phys. , vol.86 , pp. 1904
- Van Leeuwen, M.¹ Kamminga, J.-D.² Mittemeijer, E.J.³

13
- 1242327986
- B.M. Clemens, J.A. Bain, Mater. Res. Soc. Bull. 17 (1992) 46.
- (1992) Mater. Res. Soc. Bull. , vol.17 , pp. 46
- Clemens, B.M.¹ Bain, J.A.²

14
- 0034484520
- A. Saerens, P. Van Houtte, B. Meert, C. Quayhaegens, J. Appl. Crystallogr. 33 (2000) 312.
- (2000) J. Appl. Crystallogr. , vol.33 , pp. 312
- Saerens, A.¹ Van Houtte, P.² Meert, B.³ Quayhaegens, C.⁴

15
- 0032050491
- P. Gergaud, S. Labat, O. Thomas, Thin Solid Films 319 (1998) 9.
- (1998) Thin Solid Films , vol.319 , pp. 9
- Gergaud, P.¹ Labat, S.² Thomas, O.³

16
- 0038319049
- F. Badawi, P. Villain, J. Appl. Crystallogr. 36 (2003) 869.
- (2003) J. Appl. Crystallogr. , vol.36 , pp. 869
- Badawi, F.¹ Villain, P.²

17
- 0001571944
- N. Durand, K.F. Badawi, Ph. Goudeau, J. Appl. Phys. 80 (1996) 5021.
- (1996) J. Appl. Phys. , vol.80 , pp. 5021
- Durand, N.¹ Badawi, K.F.² Goudeau, Ph.³

18
- 0029278442
- L. Pranevicius, F. Badawi, N. Durand, J. Delafond, Ph. Goudeau, Surf. Coat. Technol. 71 (1995) 254.
- (1995) Surf. Coat. Technol. , vol.71 , pp. 254
- Pranevicius, L.¹ Badawi, F.² Durand, N.³ Delafond, J.⁴ Goudeau, Ph.⁵

19
- 0003427458
- Addison-Wesley, Reading
- B.D. Cullity, Elements of X-ray Diffraction, Addison-Wesley, Reading, 1978.
- (1978) Elements of X-ray Diffraction
- Cullity, B.D.¹

20
- 0001336982
- P.-O. Renault, K..F. Badawi, L. Bimbault, Ph. Goudeau, E. Elkaïm, J.P. Lauriat, Appl. Phys. Lett. 73 (1998) 1952.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1952
- Renault, P.-O.¹ Badawi, K.F.² Bimbault, L.³ Goudeau, Ph.⁴ Elkaïm, E.⁵ Lauriat, J.P.⁶

21
- 0003570874
- Butterworths
- C.J. Smithells, E.A. Brandes, Metals Reference Book, Fifth edition, Butterworths, 1976.
- (1976) Metals Reference Book, Fifth Edition
- Smithells, C.J.¹ Brandes, E.A.²

22
- 0041529690
- P. Villain, P. Goudeau, J. Ligot, S. Benayoun, K.F. Badawi, J.J. Hantzpergue, J. Vac. Sci. Technol., A, Vac. Surf. Films 21 (2003) 967.
- (2003) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.21 , pp. 967
- Villain, P.¹ Goudeau, P.² Ligot, J.³ Benayoun, S.⁴ Badawi, K.F.⁵ Hantzpergue, J.J.⁶

23
- 0035297037
- M. Leoni, U. Welzel, P. Lamparter, E.J. Mittemeijer, J.D. Kamminga, Philos. Mag., A 81 (2001) 597.
- (2001) Philos. Mag., A , vol.81 , pp. 597
- Leoni, M.¹ Welzel, U.² Lamparter, P.³ Mittemeijer, E.J.⁴ Kamminga, J.D.⁵

24
- 0042126833
- P.-O. Renault, E. Le Bourhis, P. Villain, Ph. Goudeau, K.F. Badawi, D. Faurie, Appl. Phys. Lett. 83 (2003) 473.
- (2003) Appl. Phys. Lett. , vol.83 , pp. 473
- Renault, P.-O.¹ Le Bourhis, E.² Villain, P.³ Goudeau, Ph.⁴ Badawi, K.F.⁵ Faurie, D.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.