Doping induced internal stress reduction in diamondlike carbon films deposited by pulsed laser ablation

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 61-66

  Wei, Q ^a   Narayan, R J ^a   Sharma, A K ^a   Sankar, J ^a   Narayan, J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DOPING (ADDITIVES); FILM GROWTH; LASER ABLATION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SEMICONDUCTING DIAMONDS; SEMICONDUCTING SILICON; TITANIUM;

COMPRESSIVE STRESS; DIAMOND LIKE CARBON FILM; PULSED LASER ABLATION;

AMORPHOUS FILMS;

EID: 0031389350     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-498-61     Document Type: Conference Paper

References (17)