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Volumn 10, Issue 11, 2001, Pages 2018-2023

Deposition of iron containing amorphous carbon films by filtered cathodic vacuum arc technique

Author keywords

Filtered cathodic vacuum arc; Metal containing amorphous carbon; Raman spectroscopy; Stress

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; IRON; MORPHOLOGY; PHOTOELECTRON SPECTROSCOPY; RAMAN SCATTERING; SURFACE ROUGHNESS; VACUUM APPLICATIONS;

EID: 0035499058     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00474-5     Document Type: Article
Times cited : (25)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.