|
Volumn 10, Issue 11, 2001, Pages 2018-2023
|
Deposition of iron containing amorphous carbon films by filtered cathodic vacuum arc technique
|
Author keywords
Filtered cathodic vacuum arc; Metal containing amorphous carbon; Raman spectroscopy; Stress
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
DEPOSITION;
IRON;
MORPHOLOGY;
PHOTOELECTRON SPECTROSCOPY;
RAMAN SCATTERING;
SURFACE ROUGHNESS;
VACUUM APPLICATIONS;
WAVENUMBERS;
DIAMOND LIKE CARBON FILMS;
CARBON;
DEPOSITION;
INORGANIC COATING;
IRON;
|
EID: 0035499058
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00474-5 Document Type: Article |
Times cited : (25)
|
References (22)
|