A large stepwise motion electrostatic actuator for a wireless microrobot

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 606-609

  Basset, P ^a   Kaiser, A ^a   Bigotte, P ^a   Collard, D ^b   Buchaillot, Lionel ^a  

^a University of Tokyo   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROPLATED PRODUCTS; ENERGY TRANSFER; GOLD PLATING; MOBILE ROBOTS; MOTION CONTROL; OPTIMIZATION; POLYSILICON; Q FACTOR MEASUREMENT; RECEIVING ANTENNAS; REMOTE CONTROL;

CILIARY MOTION SYSTEM; ELECTROPLATED HOLLOW MICROCOILS; EPOXY SUBSTRATE; INDUCTIVE POWERING; MOTION ELECTROSTATIC ACTUATOR; WIRELESS MICROROBOT;

ELECTROSTATIC ACTUATORS;

EID: 0036124073     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984344     Document Type: Article

References (8)

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