Power delivery and locomotion of untethered microactuators

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 947-959

  Donald, Bruce Randall ^a   Levey, Christopher G ^b   McGray, Craig D ^a   Rus, Daniela ^a   Sinclair, Mike ^c  

^a Dartmouth Department of Computer Science_Dartmouth College   (United States)

^b DARTMOUTH COLLEGE   (United States)

^c MICROSOFT RESEARCH   (United States)

Author keywords

Capacitive coupling; Microlocomotion; Microrobotics; Scratch drive actuators; Untethered microactuators

Indexed keywords

DIELECTRIC MATERIALS; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTROSTATICS; FILMS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; ROBOTS;

CAPACITIVE COUPLING; LOCOMOTION; MICROROBOTICS; POWER DELIVERY; SCRATCH DRIVE ACTUATORS; UNTETHERED MICROACTUATORS;

MICROACTUATORS;

EID: 0742321641     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.821468     Document Type: Article

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