-
2
-
-
31844436018
-
-
Paris, France
-
th ECS meeting, Paris, France (2003).
-
(2003)
th ECS Meeting
, pp. 222
-
-
Fusalba, F.1
Le Cornec, C.2
Maury, P.3
Rémiat, B.4
Jousseaume, V.5
Haxaire, K.6
Mourier, T.7
Haumesser, P.H.8
Maîtrejean, S.9
Cordeau, M.10
Feldis, H.11
Fayolle, M.12
Simon, J.13
Chabli, A.14
Passemard, G.15
-
5
-
-
84966678073
-
-
San Francisco, USA
-
P. Xu, K. Huang, A. Patel, S. Rathi, B. Tang, J. Ferguson, J. Huang, C. Ngai and M. Loboda, p. 109, Proceedings of the International Interconnect Technology Conference, San Francisco, USA (1999).
-
(1999)
Proceedings of the International Interconnect Technology Conference
, pp. 109
-
-
Xu, P.1
Huang, K.2
Patel, A.3
Rathi, S.4
Tang, B.5
Ferguson, J.6
Huang, J.7
Ngai, C.8
Loboda, M.9
-
6
-
-
84961744658
-
-
San Francisco, USA
-
S. Maitrejean, F. Fusalba, M. Patz, V. Jousseaume and T. Mourier, p. 206, Proceedings of the International Interconnect Technology Conference, San Francisco, USA (2002).
-
(2002)
Proceedings of the International Interconnect Technology Conference
, pp. 206
-
-
Maitrejean, S.1
Fusalba, F.2
Patz, M.3
Jousseaume, V.4
Mourier, T.5
-
7
-
-
0034187375
-
-
E. Kondoh, T. Asano, A. Nakashima and M. Komatu, J. Vac. Sci. Technol B, 18, 1276 (2000).
-
(2000)
J. Vac. Sci. Technol B
, vol.18
, pp. 1276
-
-
Kondoh, E.1
Asano, T.2
Nakashima, A.3
Komatu, M.4
-
8
-
-
0035499774
-
-
C.Y. Wang, J.Z. Zheng, Z.X. Shen, Y. Lin and A.T.S. Wee, Thin Solid Films, 397, 90 (2001).
-
(2001)
Thin Solid Films
, vol.397
, pp. 90
-
-
Wang, C.Y.1
Zheng, J.Z.2
Shen, Z.X.3
Lin, Y.4
Wee, A.T.S.5
-
10
-
-
0036686548
-
-
T.C. Chang, Y.S. Mor, P.T. Liu, T.M. Tsai, C.W. Chen, Y.J. Mei and S.M. Sze, J. Electrochem. Soc., 149, F81 (2002).
-
(2002)
J. Electrochem. Soc.
, vol.149
-
-
Chang, T.C.1
Mor, Y.S.2
Liu, P.T.3
Tsai, T.M.4
Chen, C.W.5
Mei, Y.J.6
Sze, S.M.7
-
11
-
-
0025417502
-
-
S. Ito, Y. Homma, E. Saski, S. Urichama and H. Morishima, J. Electrochem. Soc., 137, 1212 (1990).
-
(1990)
J. Electrochem. Soc.
, vol.137
, pp. 1212
-
-
Ito, S.1
Homma, Y.2
Saski, E.3
Urichama, S.4
Morishima, H.5
-
12
-
-
0034215919
-
-
E. Kondoh, T. Asano, H. Arao, A. Nakashima and M. Komatsu, Jpn. J. Appl. Phys., Part 1, 39, 3919 (2000).
-
(2000)
Jpn. J. Appl. Phys., Part 1
, vol.39
, pp. 3919
-
-
Kondoh, E.1
Asano, T.2
Arao, H.3
Nakashima, A.4
Komatsu, M.5
-
14
-
-
0036118847
-
-
F. Iacopi, M.R. Baklanov, E. Sleeckx, T. Conard, H. Bender, H. Meynen and K. Maex, J. Vac. Sci. Technol. B, 20, 109 (2002).
-
(2002)
J. Vac. Sci. Technol. B
, vol.20
, pp. 109
-
-
Iacopi, F.1
Baklanov, M.R.2
Sleeckx, E.3
Conard, T.4
Bender, H.5
Meynen, H.6
Maex, K.7
-
17
-
-
17144456566
-
-
A. Bourgeois, A. Brunet Bruneau, V. Jousseaume, S. Fisson, B. Demarets and J. Rivory, Thin Solid Films, 455, 366 (2004).
-
(2004)
Thin Solid Films
, vol.455
, pp. 366
-
-
Bourgeois, A.1
Brunet Bruneau, A.2
Jousseaume, V.3
Fisson, S.4
Demarets, B.5
Rivory, J.6
-
18
-
-
0032476241
-
-
H.R. Kim, H.H. Park, S.H. Hyun and G.Y. Yeom, Thin Solid Films, 332, 444 (1998).
-
(1998)
Thin Solid Films
, vol.332
, pp. 444
-
-
Kim, H.R.1
Park, H.H.2
Hyun, S.H.3
Yeom, G.Y.4
-
20
-
-
31844445352
-
-
J.J. Pankove in R.K. Willardson, A.C. Beer (Eds.), p21, Academic Press, Inc. (1984)
-
J.J. Pankove in R.K. Willardson, A.C. Beer (Eds.), p21, Academic Press, Inc. (1984).
-
-
-
-
23
-
-
0033350149
-
-
T.C. Chang, P.T. Liu, Y.S. Mor, S.M. Sze, Y.L. Yang, M.S. Feng, F.M. Pan, B.T. Dai and C.Y. Chang, J. Electrochem. Soc., 146, 3802 (1999).
-
(1999)
J. Electrochem. Soc.
, vol.146
, pp. 3802
-
-
Chang, T.C.1
Liu, P.T.2
Mor, Y.S.3
Sze, S.M.4
Yang, Y.L.5
Feng, M.S.6
Pan, F.M.7
Dai, B.T.8
Chang, C.Y.9
-
26
-
-
0032345645
-
-
A.S. Da Silva Sobrinho, N. Schühler, J.E. Klemberg-Sapieha, M.R. Weirtheimer, M. Andrews and S.C, Gujrathi, J. Vac. Sci. Technol. A, 16, 2021 (1998).
-
(1998)
J. Vac. Sci. Technol. A
, vol.16
, pp. 2021
-
-
Da Silva Sobrinho, A.S.1
Schühler, N.2
Klemberg-Sapieha, J.E.3
Weirtheimer, M.R.4
Andrews, M.5
Gujrathi, S.C.6
|