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Volumn PV 2005-01, Issue , 2005, Pages 97-110

Plasma treatments and PECVD dielectric deposition impact on porous SiOC

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIELECTRIC MATERIALS; PERMITTIVITY; POROUS MATERIALS; SILICA; SILICON COMPOUNDS;

EID: 31844439650     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (26)
  • 20
    • 31844445352 scopus 로고    scopus 로고
    • J.J. Pankove in R.K. Willardson, A.C. Beer (Eds.), p21, Academic Press, Inc. (1984)
    • J.J. Pankove in R.K. Willardson, A.C. Beer (Eds.), p21, Academic Press, Inc. (1984).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.