Description of the porosity of inhomogeneous porous low-k films using solvent adsorption studied by spectroscopic ellipsometry in the visible range

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 366-369

  Bourgeois, A ^a   Bruneau, A Brunet ^a   Jousseaume, V ^b   Rochat, N ^b   Fisson, S ^a   Demarets, B ^a   Rivory, J ^a  

^a SORBONNE UNIVERSITÉ   (France)

^b CEA GRENOBLE   (France)

Author keywords

Adsorption; Ellipsometry; Isotherm; Low k; Porous; Thin films

Indexed keywords

ADSORPTION; ADSORPTION ISOTHERMS; ELLIPSOMETRY; INTEGRATED CIRCUITS; PERMITTIVITY; PLASMA APPLICATIONS; POROSITY; SOLVENTS; SPECTROSCOPIC ANALYSIS;

COUPLING ELLIPSOMETRY; DIELECTRIC LAYERS; LOW K; SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 17144456566     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.229     Document Type: Conference Paper

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