Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): A multitechnique study of the interphase regions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2021-2030

  Da Silva Sobrinho, A S ^a   Schuhler N ^a   Klemberg Sapieha, J E ^a   Wertheimer, M R ^a   Andrews, M ^b   Gujrathi, S C ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032345645     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581305     Document Type: Article

References (36)

1. J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, J. Vac. Sci. Technol. A 15, 985 (1997).
2. S. C. Gujrathi, D. Poitras, J. E. Klemberg-Sapieha, and L. Martinu, Nucl. Instrum. Methods Phys. Res. B 118, 560 (1996).
3. H. Chatham, Surf. Coat. Technol. 78, 1 (1996).
4. N. Schühler, A. S. daSilva Sobrinho, J. E. Klemberg-Sapieha, M. Andrews, and M. R. Wertheimer, Proceedings of the 39th Society of Vacuum Coaters Annual Technical Conference, Philadelphia, PA, 1996, p. 285.
5. J. E. Klemberg-Sapieha, L. Martinu, O.M. Küttel, and M. R. Wertheimer, Proceedings of the 36th SVC Annual Technical Conference, Dallas, TX, 1993, p. 445.
6. J. T. Felts, Proceedings of the 33rd SVC Annual Technical Conference, Washington, DC, 1990, p. 184.
7. H. C. Lagowski, in Ref. 4, p. 398.
8. L. H. Sharpe, in The Interfacial Interactions in Polymeric Composites, edited by G. Akovali, NATO-ASI Series E: Applied Sciences Vol. 230 (Kluwer, Dordrecht, 1993).
9. J. E. Klemberg-Sapieha, O. M. Küttel, L. Martinu, and M. R. Wertheimer, Thin Solid Films 193/194, 965 (1990).
10. L. Martinu, J. E. Klemberg-Sapieha, O. M. Küttel, A. Raveh, and M. R. Wertheimer, J. Vac. Sci. Technol. A 12, 1360 (1994).
11. S. Schiller, U. Heisig, and S. Panzer, Electron Beam Technology (Wiley, New York, 1982).
12. R. Groleau, S. C. Gujrathi, and J. -P. Martin, Nucl. Instrum. Methods Phys. Res. 218, 11 (1983).
13. S. C. Gujrathi, P. Aubry, L. Lemay, and J. -P. Martin, Can. J. Phys. 64, 950 (1987).
14. E. Szilágyi and F. Pászti, Nucl. Instrum. Methods Phys. Res. B 85, 616 (1994).
15. E. H. Nicollian and J. R. Brews, MOS Physics and Technology (Wiley, New York, 1982), Chap. 16.
16. L. Calcagno, G. Compagni, and G. Foti, Nucl. Instrum. Methods Phys. Res. B 65, 41 (1992).
17. Ion Bombardment Modification of Surfaces, edited by O. Auciello and R. Kelly (Elsevier, New York, 1984).
18. H. Ebel, C. Pöhn, R. Svager, M. E. Wernle, M. F. Ebel, and A. Jablonski, J. Electron Spectrosc. Relat. Phenom. 50, 109 (1990).
19. D. R. Penn, J. Electron Spectrosc. Relat. Phenom. 9, 29 (1976).
20. J. C. Rotger, J. J. Pireaux, H. Caudano, N. A. Thorne, H. M. Dunlop, and M. Benmalek, J. Vac. Sci. Technol. A 13, 260 (1995).
21. N. J. Harrick, Internal Reflection Spectroscopy (Interscience, New York, 1967).
22. J. L. Koenig, Spectroscopy of Polymers (ACS Professional Reference Books, Washington, DC, 1992).
23. D. L. Allara, A. Baca, and C. A. Pryde, Macromolecules 11, 1215 (1978).
24. M. Firon, C. Bonnelle, and A. Mayeux, J. Vac. Sci. Technol. A 14, 2488 (1996).
25. A. M. Wrobel and M. R. Wertheimer, in Plasma Deposition, Treatment, and Etching of Polymers, edited by R. d'Agostino (Academic, Boston, 1990), p. 163.
26. L. J. Bellamy, The Infrared Spectra of Complex Molecules, 3rd ed. (Chapman and Hall, London, 1975), Chap. 20.
27. G. Dupont, H. Caquineau, B. Despax, R. Berjoan, and A. Dollet, J. Phys. D 30, 1064 (1997).
28. J. S. Wong and Y. S. Yenn Appl. Spectrosc. 42, 598 (1988).
29. D. W. Berreman, Phys. Rev. 130, 2193 (1963).
30. S. Vallon, B. Drévillon, F. Poncin-Epaillard, J. E. Klemberg-Sapieha, and L. Martinu, J. Vac. Sci. Technol. A 14, 3194 (1996).
31. S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, and F. Poncin-Epaillard, J. Adhes. Sci. Technol. 10, 1287 (1996).
32. S. Vallon, R. Brenot, A. Hofrichter, B. Drévillon, A. Gheorghiu, C. Sénémaud, J. E. Klemberg-Sapieha, L. Martinu, and F. Poucin-Epaillard, J. Adhes. Sci. Technol. 10, 1313 (1996).
33. A. Bergeron, D. Poitras, J. E. Klemberg-Sapieha, and L. Martinu, J. Vac. Sci. Technol. (submitted).
34. A. Holländer, J. E. Klemberg-Sapieha, and M. R. Wertheimer, J. Polym. Sci., Part A: Polym. Chem. 34, 1511 (1996).
35. A. Fozza, J. Roch, J. E. Klemberg-Sapieha, A. Kruse, A. Holländer, and M. R. Wertheimer, Nucl. Instrum. Methods Phys. Res. B 131, 205 (1997).
36. R. Groleau, J. F. Currie, M. R. Wertheimer, J. E. Klemberg-Sapieha, and K. M. Wang, Thin Solid Films 136, 85 (1986).