Low voltage electrothermal vibromotor for silicon optical bench applications

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 237-243

  Pai, Minfan ^a   Tien, Norman C ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SILICON SENSORS; VIBRATION CONTROL;

ELECTROTHERMAL VIBROMOTORS (ETV); MICRO-OPTICAL BENCH; THERMAL ACTUATORS;

MICROACTUATORS;

EID: 0033733840     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00390-8     Document Type: Article

References (10)

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