SCOPUS 정보 검색 플랫폼

Precision Engineering

Volumn 24, Issue 1, 2000, Pages 24-31

New 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air bearings

(2) Lee, Sung Q a Gweon, Dae Gab a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BEARINGS (MACHINE PARTS); DAMPING; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMETERS; PRECISION ENGINEERING; ROBUSTNESS (CONTROL SYSTEMS); STIFFNESS;

AIR BEARINGS; ELECTROMAGNETIC ACTUATORS; NANOMETER POSITIONING; Z-TILTS MICROPOSITIONING SYSTEM;

POSITION CONTROL;

EID: 0033731580 PISSN: 01416359 EISSN: None Source Type: Journal
DOI: 10.1016/S0141-6359(99)00022-7 Document Type: Article

Times cited : (54)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.