Incline compensation control using an air-spring type active isolated apparatus

Precision Engineering

Volumn 27, Issue 2, 2003, Pages 170-174

  Wakui, Shinji ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Air spring; Feed forward; Isolated apparatus; Pressure feedback

Indexed keywords

DEFORMATION; FEEDBACK; GRAVITATION; SCANNING;

INCLINE COMPENSATION CONTROL;

CONTROL SYSTEMS;

EID: 0037378359     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00227-1     Document Type: Article

References (3)

1. Wakui S. Current and future of precision positioning stage working in stepper. J. Japan Soc. Prec. Eng. 67(2):2001;202-206.
2. Wakui S., Kato H. Control performance of an air-spring type vibration isolated apparatus having pressure feedback. Int. J. Japan Soc. Prec. Eng. 33(3):1999;251-252.
3. Wakui S, Iwai I, Maeda T. Active anti-vibration apparatus and exposure apparatus. European patent EP1124078A2; 2001. p. 1-19.