High accuracy profile measurement of a machined surface by the combined method

Measurement: Journal of the International Measurement Confederation

Volumn 19, Issue 1, 1996, Pages 55-64

  Gao, Wei ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

2 Point method; Error analysis; Inclination method; Metrology; Scanning method; Software datum; Step wise profile; Straightness

Indexed keywords

AUTOMATION; COMPUTER SOFTWARE; ERROR ANALYSIS; ERRORS; NUMERICAL ANALYSIS; PROBES; SAMPLING; SCANNING; SURFACES;

INCLINATION METHOD; MACHINED SURFACE; SOFTWARE DATUM; STEP WISE PROFILE; STRAIGHTNESS;

SURFACE MEASUREMENT;

EID: 0030234365     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-2241(96)00066-8     Document Type: Article

References (14)

1. G. Makosch and B. Scholf, Surface profiling by electrooptical phase measurements, SPIE, High Resolution Soft X-Ray Optics 316 (1981) 42-53.
2. G. Makosch and B. Drollinger, Surface profile measurement with a scanning differential ac interferometer, Applied Optics 23(24) (1984) 4544-4553.
3. H. Tanaka, K. Tazawa, H. Sato, M. O-hori and H. Sekiguchi, Application of a new straightness measurement method to large machine tool, Annals CIRP 30(1) (1981) 455-459.
4. K. Tazawa, H. Sato and M. O-hori, A new method for the measurement of the straightness of machine tools and machined work, ASME Journal of Mechanical Design 104 (1982) 587-592.
5. R. Corle and G.S. Kino, Differential interference contrast imaging on a real time confocal scanning optical microscope, Applied Optics 29(26) (1990) 3769-3774.
6. T. Nagata, M. O-Hiro, Y. Tani, H. Sato and K. Suzuki, Ultra precision measurement of straightness by sequential two-point method, Journal of JSME 57(542) (1991) 3300-3304 (in Japanese).
7. S. Kiyono, P. Huang and N. Fukaya, Datum introduced by software methods, Int. Conf. of Advanced Mechatronics, Tokyo 1989, pp. 467-472.
8. S. Kiyono and E. Okuyama, Study on measurement of surface undulation (2nd Report), J. of JSPE 54(3) (1988) 513-518 (in Japanese).
9. B.A. Omar, A.J. Holloway and D.C. Emmony, Differential phase quadrature surface profiling interferometer, Applied Optics 29(31) (1990) 4715-4719.
10. S. Kiyono and H. Ogaki, Measurement of step-wise profile of machined surface with software datum, Journal of JSPE 59(8) (1993) 1319-1324 (in Japanese).
11. S. Kiyono and W. Gao, Profile measurement of machined surface with a new differential method, Precision Engineering, Journal of ASPE 16(3) (1994) 212-218.
12. [ 12] S. Kiyono and W. Gao, Design of differential probe for on-machine measurement, Journal of JSDE 27(8) (1992) 362-367 (in Japanese).
13. E. Okuyama, S. Kiyono and H. Moritoki, Effects of difference of gain between sensors when measuring straightness using multiple sensors, Journal of JSME 60(9) (1994) 3144-3149 (in Japanese).
14. R.W. Hanmming, Digital Filters, Prentice-Hall, New York, 1977 (translated into Japanese by H. Miyagawa and H. Jideki, Kagaku-Gijyutu Publishing, 1980).