Development of an optical probe for profile measurement of mirror surfaces

Optical Engineering

Volumn 36, Issue 12, 1997, Pages 3360-3366

  Gao, Wei ^a,b   Kiyono, Satoshi ^a,c  

^a TOHOKU UNIVERSITY   (Japan)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

Accuracy; Angle meters; Displacement meters; Laser diodes; Optical fiber; Optical probes; Position sensing detectors; Stability

Indexed keywords

EID: 0000347564     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601563     Document Type: Article

References (24)

1. J. H. Bruning, D. R. Herriott and etc., "Digital wavefront measuring interferometer for testing optical surfaces and lenses," Appl. Opt. 13(11), 2693-2703 (1974).
2. N. A. Massie, R. D. Nelson, and S. Holly, "High-performance real-time heterodyne interferometry," Appl. Opt. 18(11), 1797-1803 (1979).
3. N. A. Massie, "Real-time digital heterodyne interferometry: a system," Appl. Opt. 19(1), 154-160 (1980).
4. J. F. Biegen and R. A. Smythe, "High resolution phase measuring lase interferometric microscope for engineering surface metrology," Proc. SPIE 897, 207-215 (1988).
5. M. Chang and P. P. Lin, "Noncontact sphericity measurement by means of phase shift interferometry," Trans. ASME 118, 394-399 (1996).
6. R. M. Pettigrew and F. J. Hancock, "An optical profilometer," Precis. Eng. 133-136 (1979).
7. A. E. Ennos and M. S. Virdee, "High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation," Precis. Eng. 4(1), 5-8 (1982).
8. A. E. Ennos and M. S. Virdee, "Precision measurement of surface form by laser autocollimation," Proc. SPIE 389, 252-257 (1983).
9. G. Makosch and B. Solf, "Surface profiling by electro-optical phase measurements," Proc. SPIE 316, 42-53 (1981).
10. H. Tanaka, K. Tazawa, H. Sato, M. O.-hori, and H. Sekiguchi, "Application of a new straightness measurement method to large machine tool," Annal. CIRP 30(1), 455-459 (1981).
11. K. Tazawa, H. Sato, and M. O-hori, "A new method for the measurement of the straightness of machine tools and machined work," ASME J. Mech. Design 104, 587-592 (1982).
12. H. Chuang, L. M. Walpita, and W. S. C. Chang, "Simplified differential phase optical microscope," Appl. Opt. 25(18), 3014-3017 (1986).
13. M. S. Virdee, "Nanometrology of optical flats by laser autocollimation," Surf. Topograph. 1, 415-425 (1988).
14. P. Glenn, "Angstrom level profilometry for sub-millimeter to meter scale surface errors," Proc. SPIE 1333, 326-336 (1990).
15. T. R. Corle and G. S. Kino, "Differential interference contrast imaging on a real time confocal scanning optical microscope," Appl. Opt. 29(26), 3769-3774 (1990).
16. B. A. Omar, A. J. Holloway, and D. C. Emmony, "Differential phase quadrature surface profiling interferometer," Appl. Opt. 29(31), 4715-4719 (1990).
17. S. Kiyono, Y. Asakawa, M. Inamoto, and O. Kamada, "A differential laser autocollimation probe for on-machine measurement," Precis. Eng. 15(2), 68-76 (1993).
18. Y. Aoki and S. Ozono, "On a new method of roundness measurement based on the three-point method," J. JSPE 32(12), 831-836 (1996) (in Japanese).
19. Y. Kamimura, Y. Tani, and H. Sato, "On-machine measurement of form accuracies using two quadrant photocells," J. JSME 59(557), 105-111 (1993) (in Japanese).
20. S. Kiyono, W. Gao, and O. Kamada, "On-machine measurement of mirror profile," J. JSPE 58(2), 247-252 (1992) (in Japanese).
21. R. W. Hanmming, Chapter 2 and Chapter 3 in Digital Filters, Prentice-Hall, New York (1977) (translated into Japanese by H. Miyagawa and H. Jideki, Kagaku-Gijyutu Publishing, 1980).
22. S. Kiyono and W. Gao, "Profile measurement of machined surface with a new differential method," Precis. Eng. 16(3), 212-218 (1994).
23. F. A. Jenkins and H. E. White, Chapter 3 in Fundamentals of Optics, McGraw-Hill, Tokyo (1976).
24. R. J. Smith, Chapter 18 in Circuits, Devices and Systems, John Wiley & Sons, New York (1984).