Self-calibration of a scanning white light interference microscope

Optical Engineering

Volumn 39, Issue 10, 2000, Pages 2720-2725

  Kiyono, Satoshi ^a   Gao, Wei ^a   Zhang, Shizhou ^a   Aramaki, Toru ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; INTERFEROMETERS; LIGHT INTERFERENCE;

LASER INTERFEROMETERS; WHITE LIGHT INTERFERENCE MICROSCOPES;

OPTICAL MICROSCOPY;

EID: 0034296618     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1290471     Document Type: Article

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