XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2917-2920

  Kunioka, T ^a   Takeda, Y ^a   Matsuda, T ^a   Shimazu, N ^b   Nakayama, Y ^a  

^a NTT CORPORATION   (Japan)

^b ANGEL Labs Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033272920     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591096     Document Type: Article

References (10)

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4. General catalog of Nanomotion Ltd., 1998.
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6. K. Seino, Tokin Corp. Rev. (1995).
7. J. Zheng, S. Takahashi, S. Yoshikawa, and K. Uchino, J. Am. Ceram. Soc. 79, 3193 (1996).
8. Y. Fuda (private communication).
9. T. Morosawa et al., XEL'98 Digest of Papers (1998), P6-3-1.
10. K. Marume (private communication).