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Journal of the Electrochemical Society

Volumn 151, Issue 5, 2004, Pages

Synthesis and characterization of templating low dielectric constant organosilicate films

(5) Yu, Suzhu a Wong, Terence K S a Hu, Xiao b Pita, Kantisara a Ligatchev, Valeri a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

HYBRID FILMS; PARAMETER ANALYZERS; PHASE MORPHOLOGY; X-RAY REFLECTIVITY;

DECOMPOSITION; ELECTRIC POWER UTILIZATION; ELECTRON MICROSCOPY; FILM GROWTH; PERMITTIVITY; POROSITY; SILICON ALLOYS; SOL-GELS; SYNTHESIS (CHEMICAL);

THIN FILMS;

EID: 2942525279 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1688800 Document Type: Article

Times cited : (10)

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