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Volumn 565, Issue , 1999, Pages 267-272
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Atomic structure impacts on dielectric and mechanical properties of hydrogen-silsesquioxane during thermal processing
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Author keywords
[No Author keywords available]
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Indexed keywords
ALCOHOLS;
DEGRADATION;
DIELECTRIC PROPERTIES;
HYDROGEN BONDS;
HYDROGEN INORGANIC COMPOUNDS;
MECHANICAL PROPERTIES;
SENSITIVITY ANALYSIS;
TEMPERATURE;
HYDROGEN SILSESQUIOXANE;
SILANOL;
SILICON HYDROGEN BOND DEGRADATION;
THERMAL PROCESSING;
DIELECTRIC MATERIALS;
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EID: 0033297484
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-565-267 Document Type: Article |
Times cited : (5)
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References (7)
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