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Journal of the Electrochemical Society

Volumn 150, Issue 5, 2003, Pages

The effect of TEOS/MTES ratio on the structural and dielectric properties of porous silica films

(4) Yu, Suzhu a Wong, Terence K S a Hu, Xiao b Pita, Kantisara a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CHEMICAL BONDS; CONDENSATION; HYDROLYSIS; ORGANIC COMPOUNDS; PERMITTIVITY; PH EFFECTS; PORE SIZE; POROSITY; POROUS MATERIALS; SILICA; SOL-GELS;

METHYLTRIETHOXYSILANE; POROUS SILICA FILM; SPECULAR X RAY REFLECTIVITY; TETRAETHYL ORTHOSILICATE;

DIELECTRIC FILMS;

EID: 0038516896 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1566021 Document Type: Article

Times cited : (37)

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