A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 86, Issue , 2003, Pages 251-252

  Piyawattanametha, W ^a   Patterson, P ^a   Wu, M ^a   Hah, D ^b   Toshiyoshi, H ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR VERTICAL COMB DRIVE; MICROMIRRORS; ANGULAR VERTICAL COMB ACTUATORS; AUTOMATIC VOLTAGE CONTROL; BULK-MICROMACHINED; DEEP REACTIVE ION ETCHING; INTEGRATED CIRCUIT TECHNOLOGY; MICRO MIRROR; SCANNING MICROMIRROR; VERTICAL COMBDRIVE;

ACTUATORS; ELECTRIC ATTENUATORS; ELECTRIC POWER SYSTEM INTERCONNECTION; FLIP FLOP CIRCUITS; MICROMACHINING; MIRRORS; POLYSILICON; REACTIVE ION ETCHING; SCANNING; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SURFACE PHENOMENA; APPLICATION SPECIFIC INTEGRATED CIRCUITS; ETCHING; FABRICATION; INTEGRATED CIRCUITS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; SPRINGS (COMPONENTS);

MICROELECTROMECHANICAL DEVICES; OPTICAL FIBER COMMUNICATION;

EID: 1642564673     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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