Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 2003-January, Issue , 2003, Pages PD36.1-PD36.3

  Gasparyan, A ^a   Shea, H ^a   Arney, S ^a   Aksyuk, V ^a   Simon, M E ^a   Pardo, F ^a   Chan, H B ^a   Kim, J ^a   Gates, J ^a   Kraus, J S ^a   Goyal, S ^a   Carr, D ^a   Kleiman, R ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Dielectrics; Electric shock; Electrodes; Micromechanical devices; Mirrors; Optical arrays; Optical fiber networks; Optical losses; Optical switches; Silicon

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC LOSSES; ELECTRIC SWITCHES; ELECTRODES; MIRRORS; MONOCRYSTALLINE SILICON; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL LOSSES; OPTICAL SWITCHES; SILICON; SILICON WAFERS; SINGLE CRYSTALS; TELECOMMUNICATION NETWORKS; VIBRATIONS (MECHANICAL);

ELECTRIC SHOCK; HERMETICALLY SEALED; MICROMECHANICAL DEVICE; OPTICAL ARRAYS; OPTICAL CROSS CONNECT SWITCHES; OPTICAL CROSS-CONNECT; OPTICAL FIBER NETWORKS; SINGLE CRYSTAL SILICON;

OPTICAL FIBER COMMUNICATION;

EID: 84947930278     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OFC.2003.316014     Document Type: Conference Paper

References (10)

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10. J. Kim et al., "1100x1100-Port MEMS-based Optical Crossconnect with 4dB Maximum Loss", to be published.