Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 267-270

  Kudrle, T D ^a   Wang, C C ^a   Bancu, M G ^a   Hsiao, J C ^a   Pareek, A ^a   Waelti, M ^a   Kirkos, G A ^a   Shone, T ^a   Fung, C D ^a   Mastrangelo, C H ^a  

^a Corning Intellisense ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY;

MICROMIRROR ARRAYS; OPTICAL FLATNESS; RADIUS OF CURVATURE;

MIRRORS;

EID: 0038494555     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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