Modeling of imaging processes in the low-vacuum SEM

Surface and Interface Analysis

Volumn 37, Issue 11, 2005, Pages 939-941

  Thiel, Bradley L ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

Charging; Environmental SEM; ESEM; Insulating specimens; Low vacuum SEM; Secondary electron contrast

Indexed keywords

CHARGING (BATTERIES); COMPUTER SIMULATION; ELECTRIC INSULATION; ELECTRONIC PROPERTIES; SCANNING ELECTRON MICROSCOPY; VACUUM;

ENVIRONMENTAL SEM; INSULATING SPECIMENS; LOW-VACUUM SEM; SECONDARY ELECTRON CONTRAST;

IMAGE PROCESSING;

EID: 28744448122     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.2112     Document Type: Conference Paper

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