X-ray microanalysis in the environmental SEM: A challenge or a contradiction?

Mikrochimica Acta

Volumn 132, Issue 2-4, 2000, Pages 137-143

  Mansfield, John F ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Beam spreading; Energy dispersive analysis; Environmental SEM; Pressure variation in ESEM; Water vapour in ESEM

Indexed keywords

EID: 0009825560     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040050054     Document Type: Article

References (16)

1. G. D. Danilatos, Ad. Electronics Electron Phys. 1990, 78, 1.
2. R. B. Bolon, Microbeam Analysis. In: D. G. Howitt (Ed.) San Francisco Press, San Francisco, USA, 1991, p. 199.
3. B. J. Griffin, Proc. 50th EMSA, 1992, p. 1324.
4. J. B. Bilde-Sørensen, C. C. Appel, Improvements of the Spatial Resolution of XEDS in the Environmental SEM, EUREM 1996-11th Euro Congress on EM, Dublin, Ireland, Published by EUREM 96 on CD-ROM.
5. C. C. Appel, A. Horsewell, J. B. Bilde-Sørensen, Application in Materials Science of the Environmental Scanning Electron Microscope, EUREM 1996-11th Euro Congress on EM, Dublin, Ireland, Published by EUREM 96 on CD-ROM.
6. A. Horsewell, C. C. Appel, J. B. Bilde-Sørensen, Microscopy and Microanalysis. San Francisco Press, San Francisco, USA, 1996, p. 846.
7. J. B. Bilde-Sørensen, C. C. Appel, Ext. Abstr. 48th Annual Mtg. Scandinavian Soc of Electron Microscopy. In: A. B. Maunsbach (Ed.) Aarhus, Denmark, 2-5 June 1996, p. 4.
8. J. B. Bilde-Sørensen, C. C. Appel, Ext. Abstr. 49th Annual Mtg. Scandinavian Soc of Electron Microscopy. In: A. R. Tholen (Ed.) Goteborg, Sweden, 1996, p. 16.
9. E. Doehne, Scanning, 1996, 18, 164.
10. E. Doehne, Scanning, 1997, 19, 75.
11. E. Doehne, N. Bower, Microbeam Analysis San Francisco Press, San Francisco, USA, 1993, 2, p. 35.
12. D. A. Moncrieff, P. R. Barker, V. N. E. Robinson, J. Phys. D. Appl. Phys. 1979, 12, 481.
13. D. C. Joy, Proc. Annual Mtg. of MAS, MSA and MSC, Minneapolis, USA, 1996, p. 836.
14. G. D. Danilatos, Mikrochim. Acta. 1994, 114/115, 143.
15. "Electron Flight Simulator" by Small World, see http:// www.aol.com/
16. Private Communication, Hans Krusemann, FEI Co., Feb. 1999.