Accuracy and precision of quantitative energy-dispersive X-ray spectrometry in the environmental scanning electron microscope

Scanning

Volumn 26, Issue 4, 2004, Pages 167-174

  Carlton, Robert A ^a,d   Lyman, Charles E ^b   Roberts, James E ^c  

^a SANOFI   (France)

^b Lehigh University   (United States)

^c LEHIGH UNIVERSITY   (United States)

^d GLAXOSMITHKLINE   (United States)

Author keywords

Accuracy; Charge neutralization; Energy dispersive x ray spectrometry; Environmental scanning electron microscopy; NIST (NBS) SRM 482

Indexed keywords

COPPER ALLOYS; ELECTRON SCATTERING; ENERGY DISPERSIVE SPECTROSCOPY; ERROR ANALYSIS; GOLD ALLOYS; SCANNING ELECTRON MICROSCOPY;

ENERGY-DISPERSIVE X-RAY SPECTROMETRY; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPES; SURFACE CHARGES;

ELECTRON MICROSCOPES;

ALLOY; COPPER; GOLD;

ACCURACY; ARTICLE; CHEMICAL COMPOSITION; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; MOLECULAR INTERACTION; PRIORITY JOURNAL; QUANTITATIVE ENERGY DISPERSIVE X RAY SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; SIGNAL PROCESSING; SURFACE PROPERTY; WATER VAPOR; X RAY SPECTROMETRY;

COPPER; ELECTRON MICROSCOPES; ERRORS; GOLD; SCANNING ELECTRON MICROSCOPY; SCATTERING; WATER VAPOR; X RAY SPECTROSCOPY;

EID: 4644227973     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950260404     Document Type: Article

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