Charging processes in low vacuum scanning electron microscopy

Microscopy and Microanalysis

Volumn 10, Issue 6, 2004, Pages 711-720

  Thiel, Bradley L ^a   Toth, Milos ^a   Craven, John P ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Charging; Dielectrics; Environmental SEM; Imaging; Insulators; Low vacuum SEM; Microanalysis

Indexed keywords

EID: 11244331577     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604040656     Document Type: Conference Paper

References (33)

1. BATTAGLIN, G., DELLA MEA, G., DE MARCHI, G., MAZZOLDI, P., MIOTELLO, A. & GUGLIELMI, M. (1982). Field-assisted sodium migration in glasses during medium-energy proton irradiation. J Phys C 15, 5623-5627.
2. CAZAUX, J. (1986). Some considerations on the electric field induced in insulators by electron bombardment. J Appl Phys 59, 1418-1430.
3. - irradiated insulators. J Appl Phys 85, 1-11.
4. CAZAUX, J. (1999b). Mechanisms of charging in electron spectroscopy. J Electr Spect Rel Phen 105, 155-185.
5. CAZAUX, J. (2001). About the secondary electron yield and the sign of charging of electron irradiated insulators. Eur Phys J AP 15, 167-172.
6. CAZAUX, J. (2004). About the mechanisms of charging in SEM, EPMA, and ESEM with their time evolution. Microsc Microanal 10, 670-684 (this issue).
7. CRAVEN, J.P., BAKER, F.S., THIEL, B.L. & DONALD, A.M. (2002). Consequences of positive ions upon imaging in low vacuum scanning electron microscopy. J Microsc 205, 96-105.
8. GAUYACQ, J.P. & BORISOV, A.G. (1998). Charge transfer in atom-surface collisions: Effect of the presence of adsorbates on the surface. J Phys: Condens Matter 10, 6585-6619.
9. HAHN, Y. (1997). Electron-ion recombination processes - An overview. Rep Prog Phys 60, 691-759.
10. JBARA, O., CAZAUX, J. & TREBBIA, P. (1995). Sodium diffusion in glasses during electron irradiation. J Appl Phys 78, 868-875.
11. JOY, D.C. & JOY, C.S. (1996). Low voltage scanning electron microscopy. Micron 27, 247-263.
12. JUREK, K., GEDEON, O. & HULINSKY, V. (1998). Potassium migration in silica glasses during electron beam irradiation. Mikrochemica Acta 15 (Suppl), 269-272.
13. KUCHEYEV, S.O., TOTH, M., PHILLIPS, M.R., WILLIAMS, J.S., JAGADISH, C. & LI, G. (2002). X-ray spectrometry investigation of electrical isolation in GaN. J Appl Phys 91, 3940-3942.
14. LINEWEAVER, J.L. (1963). Oxygen outgassing caused by electron bombardment of glass. J Appl Phys 34, 1786-1791.
15. MASSEY, H.S.W. & BIERHOP, E.H.S. (1969). Electronic and Ionic Impact Phenomena. Oxford, UK: Clarendon Press.
16. MELCHINGER, A. & HOFMANN, S. (1995). Dynamic double layer model: Description of time dependent charging phenomena in insulators under electron beam irradiation. J Appl Phys 15, 6224-6232.
17. MIOTELLO, A. & MAZZOLDI, P. (1982). Numerical analysis of field-assisted sodium migration in electron-irradiated glasses. J Phys C 15, 5615-5621.
18. PAWLEY, J.B. (1972). Charging artifacts in the scanning electron microscope. In Scanning Electron Microscopy, Johari, O.M. (Ed.), pp. 153-160. Chicago: ITT Research Institute.
19. REIMER, L. (1985). Scanning Electron Microscopy. Berlin: Springer-Verlag.
20. SHAFFNER, T.J. (1973). The SEM-specimen system - A macroscopic mathematical model. In Scanning Electron Microscopy, Johari, O.M. (Ed.), pp. 293-300. Chicago: ITT Research Institute.
21. SHAFFNER, T.J. & HEARLE, J.W.S. (1976). Recent advances in understanding specimen charging. In Scanning Electron Microscopy, Johari, O.M. (Ed.), pp. 61-70. Chicago: ITT Research Institute.
22. STOKES, D.J., THIEL, B.L. & DONALD, A.M. (2000). Dynamic secondary electron contrast effects in liquid systems studied by environmental scanning electron microscopy. Scanning 22, 357-365.
23. THIEL, B.L., BACHE, I.C., FLETCHER, A.L., MEREDITH, P. & DONALD, A.M. (1997). An improved model for gaseous amplification in the environmental SEM. J Microsc 187, 143-157.
24. THIEL, B.L. (2004). Master curves for gas amplification in low vacuum and environmental scanning electron microscopy. Ultramicrosc 99, 35-47.
25. TOTH, M., KUCHEYEV, S.O., WILLIAMS, J.S., JAGADISH, C., PHILLIPS, M.R. & LI, G. (2000). Imaging charge trap distributions in GaN using environmental scanning electron microscopy. Appl Phys Lett 77, 1342-1344.
26. TOTH, M. & PHILLIPS, M.R. (2000). The effects of space charge on contrast in images obtained using the environmental scanning electron microscope. Scanning 22, 319-325.
27. TOTH, M., PHILLIPS, M.R., CRAVEN, J.P., THIEL, B.L. & DONALD, A.M. (2002a). Electric fields produced by electron irradiation of insulators in a low vacuum environment. J Appl Phys 91, 4492-4499.
28. TOTH, M., PHILLIPS, M.R., THIEL, B.L. & DONALD, A.M. (2002b). Electron imaging of dielectrics under simultaneous electron-ion irradiation. J Appl Phys 91, 4479-4491.
29. TOTH, M., THIEL, B.L. & DONALD, A.M. (2002c). On the role of electron-ion recombination in low vacuum scanning electron microscopy. J Microsc 205, 86-95.
30. TOTH, M., THIEL, B.L. & DONALD, A.M. (2002d). Quantification of electron-ion recombination in an electron-beam-irradiated gas capacitor. J Phys D 35, 1796-1804.
31. TOTH, M., THIEL, B.L. & DONALD, A.M. (2003). Interpretation of secondary electron images obtained using a low vacuum SEM. Ultramicroscopy 94, 71-87.
32. VAN VELD, R.D. & SHAFFNER, T.J. (1971). Charging artifacts in the scanning electron microscope. Scanning Electron Microscopy (ITT) 17-21.
33. VON ENGEL, A. (1955). Ionized Gases. Oxford: Clarendon Press.