On the role of electron-ion recombination in low vacuum scanning electron microscopy

Journal of Microscopy

Volumn 205, Issue 1, 2002, Pages 86-95

  Toth, M ^a   Thiel, B L ^a   Donald, A M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Contrast mechanisms; Electron ion recombination; ESEM; Low vacuum secondary electron imaging; SEM

Indexed keywords

ELECTRONS; IONIC STRENGTH; IONIZATION OF GASES; SECONDARY EMISSION;

CONTRAST MECHANISM; ELECTRON-ION RECOMBINATIONS; ESEM; LOW VACUUM; LOW VACUUM SECONDARY ELECTRON IMAGING; RECOMBINATION RATE; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRONS; SECONDARY ELECTRON IMAGING; SECONDARY ELECTRONS;

SCANNING ELECTRON MICROSCOPY;

ION;

ARTICLE; CONTRAST; ELECTRON; ELECTRON TRANSPORT; GAS; IMAGE DISPLAY; IMAGING; ION CURRENT; IONIZATION; MODEL; MOLECULE; PRESSURE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY; TOPOGRAPHY; VACUUM;

EID: 0036160831     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.0022-2720.2001.00968.x     Document Type: Article

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