Compact focusing system for ion and electron beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 180-184

  Reijonen, J ^a   Ji, Q ^a   King, T J ^a   Leung, K N ^a   Persaud, A ^a   Wilde, S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC SPACE CHARGE; ELECTRODES; ELECTROSTATICS; FOCUSING; ION BEAMS; OPTICAL COLLIMATORS; THERMAL EFFECTS;

PLASMA GENERATORS;

ELECTRON BEAMS;

EID: 0036125071     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1431951     Document Type: Article

References (6)