Mini rf-driven ion sources for focused ion beam systems

Review of Scientific Instruments

Volumn 74, Issue 4, 2003, Pages 2288-2292

  Jiang, X ^a   Ji, Q ^a   Chang, A ^a   Leung, K N ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTRON BEAMS; ELECTROSTATICS; FOCUSING; INDUCTIVELY COUPLED PLASMA; ION BEAMS; SPUTTERING;

FOCUSED ION BEAM SYSTEMS;

ION SOURCES;

EID: 0037666127     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1556944     Document Type: Article

References (17)

1. J. D. Casey, Jr., M. Phaneul, and C. Chandler, Abstracts of the 46th Electron, Ion, and Photon Beam Technology and Nanofabrication Conference, Anaheim, CA, 28-31 May 2002, p. 361.
2. L. Scipioni, D. Stewart, D. Ferranti, and A. Saxonis, J. Vac. Sci. Technol. B 18, 3194 (2000).
3. R. Börret, K. Jousten, K. Böhringer, and S. Kalbitzer, J. Phys. D 21, 1835 (1988).
4. Y. Lee, Q. Ji, K. N. Leung, and N. Zahir, Rev. Sci. Instrum. 71, 722 (2000).
5. J. Hopwood, Plasma Sources Sci. Technol. 1, 109 (1992).
6. J. G. Yang, N. S. Yoon, B. C. Kim, J. H. Choi, and G. S. Lee, IEEE Trans. Plasma Sci. 27, 676 (1999).
7. T. Intrator and J. Menard, Plasma Sources Sci. Technol. 5, 371 (1996).
8. R. B. Piejak, V. A. Godyak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 179 (1992).
9. V. Kaeppelin, M. Carrere, and J. B. Faure, Rev. Sci. Instrum. 72, 4377 (2001).
10. J. Amorim, H. S. Maciel, and J. P. Sudano, J. Vac. Sci. Technol. B 9, 362 (1991).
11. N. A. Yatsenko, Sov. Phys. Tech. Phys. 26, 678 (1981).
12. K. Suzuki, K. Nakamura, H. Ohkubo, and H. Sugal, Plasma Sources Sci. Technol. 7, 13 (1998).
13. G. Cunge, B. Crowley, D. Vender, and M. M. Turner, Plasma Sources Sci. Technol. 8, 576 (1999).
14. U. Kortshagen, N. D. Gibson, and J. E. Lawler, J. Phys. D 29, 1224 (1996).
15. I. M. El-Fayoumi, I. R. Jones, and M. M. Turner, J. Phys. D 31, 3082 (1998).
16. M. M. Turner and M. A. Lieberman, Plasma Sources Sci. Technol. 8, 313 (1999).
17. J. R. Coupland, R. S. Green, D. P. Hammond, and A. C. Riviere, Rev. Sci. Instrum. 44, 9 (1973).