Production of various species of focused ion beam

Review of Scientific Instruments

Volumn 73, Issue 2 II, 2002, Pages 822-

  Ji, Q ^a   King, T J ^a   Leung, K N ^b   Wilde, S B ^c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b Etcheverry Hall MCI 730   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

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Indexed keywords

EID: 0036473492     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1427351     Document Type: Conference Paper

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