Radio frequency driven multicusp sources (invited)

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 998-1002

  Leung, ka Ngo ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

CUSPED GEOMETRIES; HIGH FREQUENCY DISCHARGES; HYDROGEN IONS; HYDROGEN IONS 1 MINUS; ION BEAMS; ION SOURCES; PLASMA PRODUCTION; TRAPS

Indexed keywords

EID: 84984556261     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148705     Document Type: Conference Paper

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