New challenges in precision positioner development

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 1, Issue , 2005, Pages 408-413

  Li, Xinxin ^a   Wang, Wen ^a   Chen, Zichen ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; HINGES; NANOTECHNOLOGY;

FLEXURE HINGES; PRECISION POSITIONER; TECHNOLOGICAL DEVELOPMENT;

MECHATRONICS;

EID: 27744510682     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)

1. Egashira, Y., et al. "Development of an Ultra-Precision Positioner and Its Applications". 6th International Workshop on Beam Injection Assesment of Microstructures in Semiconductors (BIAMS 2000), Nov 12-16 2000: Diffusion and Defect Data Pt.B: Solid State Phenomena. Fukuoka: Scitec Publications Ltd., 2001.V 413-18.
2. Tenzer, Peter E. and Ridha Ben Mrad. "A systematic procedure for the design of piezoelectric inchworm precision positioners." IEEE/ASME Transactions on Mechatronics 9.2 (2004): 427-35.
3. Cusin, Pierre, Takuhiko Sawai, and Satoshi Konishi. "Compact and precise positioner based on the Inchworm principle." Journal of Micromechanics and Microengineering 10.4 (2000): 516-21.
4. Claeyssen, F., N. Lhermet, and T. Maillard. "Magnetostrictive Actuators Compared to Piezoelectric Actuators". Proceedings of SPIE The International Society for Optical Engineering. Presquile de Giens, France: The International Society for Optical Engineering, 2002.V 194-200.
5. Kano, Yoshio, Masaki Yamaguchi, and Masayuki Sugawara. "Two-dimensional dc surface motor using window-shaped coils." Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi) 128.1 (1999): 70-77.
6. Gao, Wei, et al. "A surface motor-driven planar motion stage integrated with an XY8z surface encoder for precision positioning." Precision Engineering 28.3 (2004): 329-37.
7. Chen Yongxiao, Guo Jifeng, Ultrasonic Motor, Zhejiang University Press, 1994, P214
8. Awaddy, B. A., Shih Wu-Chu, and D. M. Auslander. "Nanometer positioning of a linear motion stage under static loads." Mechatronics, IEEE/ASME Transactions on 3.2 (1998): 113-19.
9. Hsieh, Chen and Y. C. Pan. "Dynamic behavior and modelling of the pre-sliding static friction." Wear 242.1 (2000): 1-17.
10. Lin, Ting Yung, Yih Chieh Pan, and Chen Hsieh. "Precision-limit positioning of direct drive systems with the existence of friction." Control Engineering Practice J 1.3 (2003): 233-44.
11. Wang Jianlin, Hu Xiaotang, "Current Situation of Nano-positioning Technology."Mechnical Design and Study Vo!.2 (2000):43-44.
12. Liu Dezhong, Xu Yihua, et al. 'Design and Manufacture of the Amplifier Based on Flexible Joint". Journal of Beijing Polytechnic University. Beijing, P.R.China, 27.2(2001): 161-163.
13. th Strait manufacturing technology (2004), 334-350
14. S. J. Orfanidis, "Introduction To Signal Processing", Prentice Hall, 1996: 644-669
15. Lu Haibao, Laser Photo-electrical Detection Technology, National Defense Science and Technology University Press, 2000, P187-188
16. Zhao,Yuliang, Laser micro-displacement measurement system based on CCD, Jiguang Jishu/Laser Technology,2003, V 27(1), 73-76
17. Zheng, Lei, et al. "Study on the Micro-Displacement Measurement by Laser Interference and Image Processing Methods". Proceedings of SPI - The International Society for Optical Engineering. Beijing, China: 2003.V 366-71.
18. Gao, Wei, et al. "A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers." Precision Engineering 26.4 (2002): 396-404.
19. W.Gao. "A dual-mode surface encoder for position measurement." Sensors and Actuators (2004).
20. Gao, W., et al. "Precision non-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder." Precision Engineering 27 (2003) 289-298
21. Liu, Hongzhong. "Ultra-precision positioning system and die study on its linear compensation," Journal of Xi'an JiaoTong University 37.3 (2003): 277-81.
22. Pahk, Heui Jae, Dong Sung Lee, and Jong Ho Park. "Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation." International Journal of Machine Tools and Manufacture 41.1 (2001): 51-63.
23. Sergey Borodin. "Nano-Positioning System Using Linear Ultrasonic Motor with Shaking Beam." Journal of Electroceramics 12 (2004): 169-73.