Study of ultra precision positioning system and linearity compensation

Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

Volumn 37, Issue 3, 2003, Pages 277-281

  Liu, Hongzhong ^a   Lu, Bingheng ^a   Ding, Yucheng ^a   Li, Hansong ^a   Yan, Le ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Coarse stage; Dual servo control; Fine stage; Ultra precision

Indexed keywords

CONTROL NONLINEARITIES; DIGITAL FILTERS; HYSTERESIS; MOTORS;

COARSE STAGE; DUAL SERVO CONTROL; FINE STAGE; ULTRA PRECISION;

POSITION CONTROL;

EID: 0042819688     PISSN: 0253987X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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