A systematic procedure for the design of piezoelectric inchworm precision positioners

IEEE/ASME Transactions on Mechatronics

Volumn 9, Issue 2, 2004, Pages 427-435

  Tenzer, Peter E ^a   Mrad, Ridha Ben ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; LINEAR MOTORS; MICROACTUATORS; MODAL ANALYSIS; MOTION CONTROL; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; POSITION CONTROL; PRECISION ENGINEERING;

INCHWORM PIEZOELECTRIC MOTOR; INCHWORM PRECISION POSITIONER; PIEZOELECTRIC ACTUATOR; PRECISION MOTION CONTROL;

MICROMANIPULATORS;

EID: 3343005629     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2004.828627     Document Type: Article

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