Nano-positioning system using linear ultrasonic motor with "shaking beam"

Journal of Electroceramics

Volumn 12, Issue 3, 2004, Pages 169-173

  Borodin, Sergey ^a,b   Kim, Jeong Do ^c   Kim, Hyun Jai ^a   Vasiljev, Piotr ^b   Yoon, Seok Jin ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b VYTAUTAS MAGNUS UNIVERSITY   (Lithuania)

^c Hoseo University   (South Korea)

Author keywords

Nano positioning; Resolution; Shaking beam; Ultrasonic linear motor

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; HARMONIC GENERATION; SPURIOUS SIGNAL NOISE; TRANSDUCERS; ULTRASONIC DEVICES; VIBRATIONS (MECHANICAL); VIBRATORS;

LINEAR ULTRASONIC MOTORS; MAGNETIC NOISE; NANO-POSITIONING SYSTEMS; SHAKING BEAMS;

MOTORS;

EID: 4344641172     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JECR.0000037722.27973.d3     Document Type: Article

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