Nanometer positioning of a linear motion stage under static loads

IEEE/ASME Transactions on Mechatronics

Volumn 3, Issue 2, 1998, Pages 113-119

  Awabdy, Brian A ^a,b   Shih, Wu Chu ^a   Auslander, David M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b IBM   (United States)

Author keywords

Friction; Motion control; Position control; Position measurement

Indexed keywords

ACTUATORS; ALGORITHMS; CLOSED LOOP CONTROL SYSTEMS; FEEDBACK CONTROL; FRICTION; LEAD SCREWS; LOADS (FORCES); MATHEMATICAL MODELS; POSITION CONTROL; POSITION MEASUREMENT;

NANOMETER POSITIONING;

MOTION CONTROL;

EID: 0032097134     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.686679     Document Type: Article

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