Study on the micro-displacement measurement by laser interference and image processing methods

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5253, Issue , 2003, Pages 366-371

  Zheng, Lei ^a   Wang, Jiadao ^a   Kong, Xianmei ^a   Chen, Darong ^a   Liu, Zhongyou ^b   Qian, Jin ^b   Li, Yongjian ^b  

^a TSINGHUA UNIVERSITY   (China)

^b NATIONAL INSTITUTE OF METROLOGY   (China)

Author keywords

CCD; Image Process; Interference stripe images; Micro displacement

Indexed keywords

CHARGE COUPLED DEVICES; FOURIER TRANSFORMS; IMAGE PROCESSING; LASER APPLICATIONS; LIGHT INTERFERENCE; LOW PASS FILTERS; MIRRORS;

INTERFERENCE STRIPE IMAGES; LASER INTERFERENCE; MICRO-DISPLACEMENT;

MEASUREMENT THEORY;

EID: 2342558080     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.521907     Document Type: Conference Paper

References (6)

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