Development of an ultra-precision positioner and its applications

Solid State Phenomena

Volumn 78-79, Issue , 2001, Pages 413-418

  Egashira, Y ^a   Kosaka, K ^a   Takada, S ^a   Iwabuchi, T ^a   Shibata, M ^a   Nagamoto, K ^a   Kubota, H ^a  

^a KUMAMOTO UNIVERSITY   (Japan)

Author keywords

Piezoelectric device; Positioner; Ultra precision stage; Ultrasonic motor

Indexed keywords

ELECTRIC MOTORS; LSI CIRCUITS; MAGNETIC DEVICES; NANOTECHNOLOGY; POSITION CONTROL; ULTRASONIC DEVICES;

CONVENTIONAL MAGNETIC MOTOR; CONVENTIONAL POSITIONERS; NANOSCALE PATTERNING; OPTICAL SOURCES; ULTRA PRECISION POSITIONER; ULTRAPRECISION ENGINEERING;

PIEZOELECTRIC DEVICES;

EID: 0035019568     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.78-79.413     Document Type: Conference Paper

References (12)

1. Positioning technology in X-ray lithography
2. Electron beam lithography
3. Ultra-precision positioning using lead screw drive (3rd report)
4. Comparison of positioning resolution of feed drive devices for ultra-precision machine tools
5. The accuracy improvement of a piezoelectric inchworm mechanism
6. Design of the electrostatic linear microactuator based on the inchworm motion
7. Piezoelectric ultrasonic motors; overview
8. Ultrasonic motor
9. Ultrasonic actuators for nanometre positioning
10. Survey of the present state of the art of piezoelectric linear motors