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Volumn 1, Issue , 2005, Pages 243-246

Vibrating RF MEMS technology: Fuel for an integrated micromechanical circuit revolution?

Author keywords

LSI; Micro mechanical circuit; Quality factor; Resonator; RF MEMS; VLSI; Wireless communications

Indexed keywords

MICRO-MECHANICAL CIRCUITS; QUALITY FACTORS; RF MEMS; WIRELESS HANDSETS;

EID: 27544502990     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496402     Document Type: Conference Paper
Times cited : (21)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.