Submicron pattern transfer to binary semiconductors via micromolding in capillaries

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2248-2251

  Pisignano, Dario ^a,b   Gigli, Giuseppe ^a   Visconti, Paolo ^a   Zocco, Anna ^a   Perrone, Alessio ^a   Cingolani, Roberto ^a  

^a INFM   (Italy)

^b UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARITY; FIELD EFFECT TRANSISTORS; LITHOGRAPHY; OPTIMIZATION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE;

BINARY SEMICONDUCTORS; MICROMOLDING; SUBMICRON PATTERN TRANSFER;

SEMICONDUCTOR MATERIALS;

EID: 0036883081     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1517263     Document Type: Article

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