RF MEMS Technologies Fabricated Using Low Temperature Processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5342, Issue , 2004, Pages 42-52

  Dyck, Christopher W ^a   Nordquist, Christopher D ^a   Kraus, Garth ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Microwave; RF MEMS; Surface micromachining; Switch

Indexed keywords

MONOLITHIC INTEGRATION; POWER DISSIPATION; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS (RF MEMS); SURFACE MICROMACHINING;

ANTENNAS; ELECTRONICS ENGINEERING; INSERTION LOSSES; LOW TEMPERATURE EFFECTS; MATHEMATICAL MODELS; MICROMACHINING; MICROWAVE CIRCUITS; MICROWAVES; OPTICAL SWITCHES; OPTIMIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SATELLITE COMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142819637     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538377     Document Type: Conference Paper

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