High-isolation CPW MEMS shunt switches-part 2: Design

IEEE Transactions on Microwave Theory and Techniques

Volumn 48, Issue 6, 2000, Pages 1045-1052

  Muldavin, Jeremy B ^a   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Low loss; MEMS; Micromachining, microwave; Millimeter wave; Switches

Indexed keywords

SERIES RESISTANCE; THREE DIMENSIONAL STATIC SOLVERS;

CAPACITANCE; ELECTRIC RESISTANCE; MILLIMETER WAVES; NATURAL FREQUENCIES; SWITCHES; THREE DIMENSIONAL; WAVEGUIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034206493     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.904743     Document Type: Article

References (3)

1. H. A. Atwater, "Circuit design of the loaded-line phase shifter," IEEE Trans. Microwave Theory Tech., vol. MTT-33, pp. 626-634, July 1985.
2. J. B. Muldavin and G. M. Rebeiz, "High isolation MEMS shunt switches - Part 1: Modeling," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 1045-1052, June 1999.
3. R. B. Marks, "A multiline method of network analyzer calibration," IEEE Trans. Microwave Theory Tech., vol. 39, pp. 1205-1215, July 1991.